In industry, material degradation of components and equipment arises from one or more of the three modes: wear, corrosion and fracture. The lifetime of the component is determined by the interaction among materials properties, component design, and the application conditions. This course intends to give a comprehensive knowledge on materials degradation and preventive methods by surface engineering. In addition, the fabrication of microelectronic devices will also be introduced in this course. This course focuses on the following topics: Surfaces: Their Nature, Roughness & Characterization; Corrosion; Tribology; Friction, Wear & Lubrication; Surface Treatment, Coating & Cleaning; Fabrication of Microelectronic Devices.